Yunsheng can provide quartzware for all of the common single wafer
applications such as Rings, Windows, GDPs, Injectors, Domes, Liners for
CVD, RTP / RTO, EPI and Etch processes.
Solutions are available for processing 4 inch up to 12 inch wafers.
Being vertically integrated Heraeus has in-house access to a variety of base materials to meet specific customer needs.
